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Highlights of Our Batch Type Equipments
1. Multiple Patents (Including Software): Innovative design with multiple patents, recognized and validated by the market.
2. Specialized Pressure Stabilization Design: Stable pressure control without the need for an APC pneumatic valve, ensuring consistent process stability.
3. Aluminum Alloy Vacuum Chamber: The chamber walls can be upgraded with cooling functions based on process requirements.
4. Specially Designed Electrodes and Pins: Even RF distribution with electrodes that can be customized with cooling functions according to the client's process needs.
5. Hidden Gas Line Integration: No external hoses on the equipment door (with an option to upgrade to a fully automatic door opening and closing design).
6. Concealed Inlet Airflow Design within Chamber Door: Ensures excellent plasma uniformity.
7. Culmination of Over 20 Years of Expertise from Taiwan's Semiconductor Equipment Team: Represents the pinnacle of vacuum chamber plasma equipment, offering the best cost-performance ratio on the market.
· The PLC controls the output frequency of the inverter based on feedback from the vacuum gauge's pressure readings.
· The inverter output regulates the speed of the Roots pump to achieve precise pressure control.
The internal chamber volume is available in two options: 110L and 140L.
The chamber is made from aluminum alloy Al-7075.
The chamber walls can be upgraded with a water-cooling function based on specific process requirements.
· The number of electrode layers is designed according to the customer's specific needs.
· Each layer has an effective area of 360 x 360 mm.
· Each layer functions as an independent plasma cleaning zone.
· Each electrode plate weighs approximately 2.2 kg.
· Gravity contact electrodes require minimal replacement (virtually maintenance-free).
Hidden gas line integration ensures that there are no external hoses on the equipment door.
(The design can be upgraded to a fully automatic door opening and closing system)
Left: Old model with intake ducts exposed
Middle: New model features concealed gas intake ducts
Right: Fully upgraded automatic lift door
The door panel features a matrix distribution of intake channels, designed with multiple equidistant flow paths to enhance the uniformity of airflow distribution. This design eliminates flow field blind spots within the vacuum chamber, ensuring that the product is thoroughly cleaned with no dead zones.
The observation window, combined with a photoelectric conversion circuit in a closed-loop monitoring system, allows the visible light generated by the plasma to be converted into a switch signal. This enables closed-loop monitoring to verify whether the plasma is actively functioning and outputting as expected.
Batch Type Electrode Options
For processing large quantities or products with complex, three-dimensional structures, we offer two different electrode designs:
Flat Plate Electrode
Depending on the process requirements, the system can support up to ten electrode plates (with a standard configuration of five layers).
Magazine-Type Electrode
The upper and lower layers can hold 8 to 10 magazines, with each magazine capable of accommodating lead frames up to 75 mm wide. A total of 8 magazines can be placed within this configuration.
After plasma treatment, the contact angle of the water droplet at the center of the lead frame can be reduced to below 40 degrees. The low-temperature plasma treatment (≤60°C) ensures that the material does not discolor.
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